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The wafer tubes are accessible in different shapes, designs, colors and material quality. The wafer tubes on the site are available with various distinct surface handling treatments such as screen printing, offset printing and so on, to make them look aesthetically appealing while also being reliable in nature.
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Get PriceAt the outer end of the robot arm is a wand having a wafer engaging and retaining means such as an edge grip device or a vacuum port that enables it to pick-up, place and transport wafers. In order to perform these actions, the robot must have precise knowledge of the R, .theta. and Z positions at which to pick-up and place wafers at both ...
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Get PriceThe principal results of a study concerning the industrial transfer in MOS memory wafer fabrication, of an intrabay material handling system based on a track‐robot are presented. A prototype system, installed in L'Aquila University Operations Laboratory, was used in order to verify the congruence of the track‐robot performance within the productive tasks to be carried out.
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Get Price5. The robot hand of claim 2, further comprising a temperature measurement circuit configured to measure a temperature of the wafer disposed on the loading region of the transfer plate. 6. The robot hand of claim 5, wherein the temperature measurement circuit comprises a temperature sensor disposed on the transfer plate. 7.
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